MEMS原型將用作替代時(shí)鐘源。它與石英晶體不同，因?yàn)樗峭ㄟ^靜電而不是壓電方式激發(fā)和感應(yīng)的。與膨脹或改變形狀的石英對(duì)應(yīng)物不同，這些多晶硅諧振器的物理移動(dòng)方式與音叉振動(dòng)的方式大致相同。

CB3LV-3C-25M0000	CTS晶振	CB3LV	25MHz	±50ppm
CB3LV-3C-25M0000	CTS晶振	CB3LV	25MHz	±50ppm
CB3LV-3C-25M0000	CTS晶振	CB3LV	25MHz	±50ppm
CB3LV-3I-50M0000	CTS晶振	CB3LV	50MHz	±50ppm
CB3LV-3I-50M0000	CTS晶振	CB3LV	50MHz	±50ppm
CB3LV-3I-50M0000	CTS晶振	CB3LV	50MHz	±50ppm
CB3LV-3C-50M0000	CTS晶振	CB3LV	50MHz	±50ppm
CB3LV-3C-50M0000	CTS晶振	CB3LV	50MHz	±50ppm
CB3LV-3C-50M0000	CTS晶振	CB3LV	50MHz	±50ppm
CB3LV-3I-30M0000	CTS晶振	CB3LV	30MHz	±50ppm
CB3LV-3I-30M0000	CTS晶振	CB3LV	30MHz	±50ppm
CB3LV-3I-30M0000	CTS晶振	CB3LV	30MHz	±50ppm
CB3LV-3I-20M0000	CTS晶振	CB3LV	20MHz	±50ppm
CB3LV-3I-20M0000	CTS晶振	CB3LV	20MHz	±50ppm
CB3LV-3I-20M0000	CTS晶振	CB3LV	20MHz	±50ppm
CB3LV-3C-4M0000	CTS晶振	CB3LV	4MHz	±50ppm
CB3LV-3C-4M0000	CTS晶振	CB3LV	4MHz	±50ppm
CB3LV-3C-4M0000	CTS晶振	CB3LV	4MHz	±50ppm
CB3LV-3C-12M2880	CTS晶振	CB3LV	12.288MHz	±50ppm
CB3LV-3C-12M2880	CTS晶振	CB3LV	12.288MHz	±50ppm
CB3LV-3C-12M2880	CTS晶振	CB3LV	12.288MHz	±50ppm
CB3LV-3C-20M0000	CTS晶振	CB3LV	20MHz	±50ppm
CB3LV-3C-20M0000	CTS晶振	CB3LV	20MHz	±50ppm
CB3LV-3C-20M0000	CTS晶振	CB3LV	20MHz	±50ppm
CB3LV-3I-25M0000	CTS晶振	CB3LV	25MHz	±50ppm
CB3LV-3I-25M0000	CTS晶振	CB3LV	25MHz	±50ppm
CB3LV-3I-25M0000	CTS晶振	CB3LV	25MHz	±50ppm
CB3LV-3I-48M0000	CTS晶振	CB3LV	48MHz	±50ppm
CB3LV-3I-48M0000	CTS晶振	CB3LV	48MHz	±50ppm
CB3LV-3I-48M0000	CTS晶振	CB3LV	48MHz	±50ppm

  該原型的作用也與目前市場(chǎng)上產(chǎn)品中使用的其他微型機(jī)器有些不同——例如壓力和加速度傳感器——它們是微小的移動(dòng)齒輪和銷釘。

CB3LV-3C-24M0000	CTS晶振	CB3LV	24MHz	±50ppm
CB3LV-3C-24M0000	CTS晶振	CB3LV	24MHz	±50ppm
CB3LV-3C-24M0000	CTS晶振	CB3LV	24MHz	±50ppm
CB3LV-3I-8M0000	CTS晶振	CB3LV	8MHz	±50ppm
CB3LV-3I-8M0000	CTS晶振	CB3LV	8MHz	±50ppm
CB3LV-3I-8M0000	CTS晶振	CB3LV	8MHz	±50ppm
CB3LV-3I-8M1920	CTS晶振	CB3LV	8.192MHz	±50ppm
CB3LV-3I-8M1920	CTS晶振	CB3LV	8.192MHz	±50ppm
CB3LV-3I-8M1920	CTS晶振	CB3LV	8.192MHz	±50ppm
CB3LV-3C-40M0000	CTS晶振	CB3LV	40MHz	±50ppm
CB3LV-3C-40M0000	CTS晶振	CB3LV	40MHz	±50ppm
CB3LV-3C-40M0000	CTS晶振	CB3LV	40MHz	±50ppm
CB3LV-3I-12M0000	CTS晶振	CB3LV	12MHz	±50ppm
CB3LV-3I-12M0000	CTS晶振	CB3LV	12MHz	±50ppm
CB3LV-3I-12M0000	CTS晶振	CB3LV	12MHz	±50ppm
CB3LV-3I-24M0000	CTS晶振	CB3LV	24MHz	±50ppm
CB3LV-3I-24M0000	CTS晶振	CB3LV	24MHz	±50ppm
CB3LV-3I-24M0000	CTS晶振	CB3LV	24MHz	±50ppm
CB3LV-3I-10M0000	CTS晶振	CB3LV	10MHz	±50ppm
CB3LV-3I-10M0000	CTS晶振	CB3LV	10MHz	±50ppm
CB3LV-3I-10M0000	CTS晶振	CB3LV	10MHz	±50ppm
CB3LV-3C-8M0000	CTS晶振	CB3LV	8MHz	±50ppm
CB3LV-3C-8M0000	CTS晶振	CB3LV	8MHz	±50ppm
CB3LV-3C-8M0000	CTS晶振	CB3LV	8MHz	±50ppm
CB3LV-3C-10M0000	CTS晶振	CB3LV	10MHz	±50ppm
CB3LV-3C-10M0000	CTS晶振	CB3LV	10MHz	±50ppm
CB3LV-3C-10M0000	CTS晶振	CB3LV	10MHz	±50ppm
CB3LV-3C-12M0000	CTS晶振	CB3LV	12MHz	±50ppm
CB3LV-3C-12M0000	CTS晶振	CB3LV	12MHz	±50ppm
CB3LV-3C-12M0000	CTS晶振	CB3LV	12MHz	±50ppm

  通過高倍顯微鏡觀察，MEMS計(jì)時(shí)設(shè)備原型看起來就像一個(gè)微型雙端音叉。它由兩條非常細(xì)的細(xì)繩或尖齒組成——10根可以裝在針頭上——平行固定在紅細(xì)胞大小的致動(dòng)器框架上。在連續(xù)反饋回路（振蕩效應(yīng)）中設(shè)置的電壓通過執(zhí)行器框架施加，導(dǎo)致琴弦來回移動(dòng)。因?yàn)樗鼈兎浅Ｐ?，所以MEMS振動(dòng)極快并產(chǎn)生約1MHz的頻率。盡管對(duì)于系統(tǒng)時(shí)鐘來說這是一個(gè)相對(duì)較低的頻率，但原型振蕩器是第一個(gè)在音頻范圍以上工作的集成振蕩器。

CB3LV-3C-29M4912	CTS晶振	CB3LV	29.4912MHz	±50ppm
CB3LV-3C-29M4912	CTS晶振	CB3LV	29.4912MHz	±50ppm
CB3LV-3C-29M4912	CTS晶振	CB3LV	29.4912MHz	±50ppm
CB3LV-3C-30M0000	CTS晶振	CB3LV	30MHz	±50ppm
CB3LV-3C-30M0000	CTS晶振	CB3LV	30MHz	±50ppm
CB3LV-3C-30M0000	CTS晶振	CB3LV	30MHz	±50ppm
CB3LV-3C-48M0000	CTS晶振	CB3LV	48MHz	±50ppm
CB3LV-3C-48M0000	CTS晶振	CB3LV	48MHz	±50ppm
CB3LV-3C-48M0000	CTS晶振	CB3LV	48MHz	±50ppm
CB3LV-3C-60M0000	CTS晶振	CB3LV	60MHz	±50ppm
CB3LV-3C-60M0000	CTS晶振	CB3LV	60MHz	±50ppm
CB3LV-3C-60M0000	CTS晶振	CB3LV	60MHz	±50ppm
CB3LV-3I-27M0000	CTS晶振	CB3LV	27MHz	±50ppm
CB3LV-3I-27M0000	CTS晶振	CB3LV	27MHz	±50ppm
CB3LV-3I-27M0000	CTS晶振	CB3LV	27MHz	±50ppm
CB3LV-3C-1M5440	CTS晶振	CB3LV	1.544MHz	±50ppm
CB3LV-3C-1M5440	CTS晶振	CB3LV	1.544MHz	±50ppm
CB3LV-3C-1M5440	CTS晶振	CB3LV	1.544MHz	±50ppm
CB3LV-3C-32M0000	CTS晶振	CB3LV	32MHz	±50ppm
CB3LV-3C-32M0000	CTS晶振	CB3LV	32MHz	±50ppm
CB3LV-3C-32M0000	CTS晶振	CB3LV	32MHz	±50ppm
CB3LV-3C-33M3330	CTS晶振	CB3LV	33.333MHz	±50ppm
CB3LV-3C-33M3330	CTS晶振	CB3LV	33.333MHz	±50ppm
CB3LV-3C-33M3330	CTS晶振	CB3LV	33.333MHz	±50ppm
CB3LV-3C-45M0000	CTS晶振	CB3LV	45MHz	±50ppm
CB3LV-3C-45M0000	CTS晶振	CB3LV	45MHz	±50ppm
CB3LV-3C-45M0000	CTS晶振	CB3LV	45MHz	±50ppm
CB3LV-3I-18M4320	CTS晶振	CB3LV	18.432MHz	±50ppm
CB3LV-3I-18M4320	CTS晶振	CB3LV	18.432MHz	±50ppm
CB3LV-3I-18M4320	CTS晶振	CB3LV	18.432MHz	±50ppm

  在桑迪亞制造這些設(shè)備的過程似乎能夠制造頻率高于10MHz的集成振蕩器。盡管頻率很高，但這些微型機(jī)器產(chǎn)生的噪音非常低——主要是由于機(jī)械結(jié)構(gòu)與電子設(shè)備的集成以及電子電路的設(shè)計(jì)。

CB3LV-3I-33M0000	CTS晶振	CB3LV	33MHz	±50ppm
CB3LV-3I-33M0000	CTS晶振	CB3LV	33MHz	±50ppm
CB3LV-3I-33M0000	CTS晶振	CB3LV	33MHz	±50ppm
CB3LV-3I-24M5760	CTS晶振	CB3LV	24.576MHz	±50ppm
CB3LV-3I-24M5760	CTS晶振	CB3LV	24.576MHz	±50ppm
CB3LV-3I-24M5760	CTS晶振	CB3LV	24.576MHz	±50ppm
CB3LV-3I-60M0000	CTS晶振	CB3LV	60MHz	±50ppm
CB3LV-3I-60M0000	CTS晶振	CB3LV	60MHz	±50ppm
CB3LV-3I-60M0000	CTS晶振	CB3LV	60MHz	±50ppm
CB3LV-3I-3M579545	CTS晶振	CB3LV	3.579545MHz	±50ppm
CB3LV-3I-3M579545	CTS晶振	CB3LV	3.579545MHz	±50ppm
CB3LV-3I-3M579545	CTS晶振	CB3LV	3.579545MHz	±50ppm
CB3LV-3I-16M0000	CTS晶振	CB3LV	16MHz	±50ppm
CB3LV-3I-16M0000	CTS晶振	CB3LV	16MHz	±50ppm
CB3LV-3I-16M0000	CTS晶振	CB3LV	16MHz	±50ppm
636L3C012M00000	CTS晶振	636	12MHz	±50ppm
636L3C012M00000	CTS晶振	636	12MHz	±50ppm
636L3C012M00000	CTS晶振	636	12MHz	±50ppm
636L3C025M00000	CTS晶振	636	25MHz	±50ppm
636L3C025M00000	CTS晶振	636	25MHz	±50ppm
636L3C025M00000	CTS晶振	636	25MHz	±50ppm
636L3I025M00000	CTS晶振	636	25MHz	±50ppm
636L3I025M00000	CTS晶振	636	25MHz	±50ppm
636L3I025M00000	CTS晶振	636	25MHz	±50ppm
636L3C018M43200	CTS晶振	636	18.432MHz	±50ppm

  這些頻率提供了數(shù)字電子設(shè)備運(yùn)行所需的恒定定時(shí)信號(hào)。由于噪聲低，信號(hào)是恒定的，不會(huì)中斷，從而提高了準(zhǔn)確性。

636L3C018M43200	CTS晶振	636	18.432MHz	±50ppm
636L3C018M43200	CTS晶振	636	18.432MHz	±50ppm
636L3C020M00000	CTS晶振	636	20MHz	±50ppm
636L3C020M00000	CTS晶振	636	20MHz	±50ppm
636L3C020M00000	CTS晶振	636	20MHz	±50ppm
636L3C024M00000	CTS晶振	636	24MHz	±50ppm
636L3C024M00000	CTS晶振	636	24MHz	±50ppm
636L3C024M00000	CTS晶振	636	24MHz	±50ppm
636L3C048M00000	CTS晶振	636	48MHz	±50ppm
636L3C048M00000	CTS晶振	636	48MHz	±50ppm
636L3C048M00000	CTS晶振	636	48MHz	±50ppm
636L3I003M68640	CTS晶振	636	3.6864MHz	±50ppm
636L3I003M68640	CTS晶振	636	3.6864MHz	±50ppm
636L3I003M68640	CTS晶振	636	3.6864MHz	±50ppm
636L3C024M57600	CTS晶振	636	24.576MHz	±50ppm
636L3C024M57600	CTS晶振	636	24.576MHz	±50ppm
636L3C024M57600	CTS晶振	636	24.576MHz	±50ppm
636L3I050M00000	CTS晶振	636	50MHz	±50ppm
636L3I050M00000	CTS晶振	636	50MHz	±50ppm
636L3I050M00000	CTS晶振	636	50MHz	±50ppm
CB3-3I-16M0000	CTS晶振	CB3	16MHz	±50ppm
CB3-3I-16M0000	CTS晶振	CB3	16MHz	±50ppm
CB3-3I-16M0000	CTS晶振	CB3	16MHz	±50ppm
CB3-3C-12M0000	CTS晶振	CB3	12MHz	±50ppm
CB3-3C-12M0000	CTS晶振	CB3	12MHz	±50ppm
CB3-3C-12M0000	CTS晶振	CB3	12MHz	±50ppm
CB3-3C-10M0000	CTS晶振	CB3	10MHz	±50ppm
CB3-3C-10M0000	CTS晶振	CB3	10MHz	±50ppm
CB3-3C-10M0000	CTS晶振	CB3	10MHz	±50ppm
CB3-3C-4M0000	CTS晶振	CB3	4MHz	±50ppm

  用作振蕩器的音叉形狀的微型機(jī)器并不新鮮。獨(dú)特之處在于將MEMS振蕩器與集成電路放在同一芯片上。

CB3-3C-4M0000	CTS晶振	CB3	4MHz	±50ppm
CB3-3C-4M0000	CTS晶振	CB3	4MHz	±50ppm
CB3-3C-7M3728	CTS晶振	CB3	7.3728MHz	±50ppm
CB3-3C-7M3728	CTS晶振	CB3	7.3728MHz	±50ppm
CB3-3C-7M3728	CTS晶振	CB3	7.3728MHz	±50ppm
CB3-3C-16M0000	CTS晶振	CB3	16MHz	±50ppm
CB3-3C-16M0000	CTS晶振	CB3	16MHz	±50ppm
CB3-3C-16M0000	CTS晶振	CB3	16MHz	±50ppm
CB3-3C-32M0000	CTS晶振	CB3	32MHz	±50ppm
CB3-3C-32M0000	CTS晶振	CB3	32MHz	±50ppm
CB3-3C-32M0000	CTS晶振	CB3	32MHz	±50ppm
CB3-3C-33M3330	CTS晶振	CB3	33.333MHz	±50ppm
CB3-3C-33M3330	CTS晶振	CB3	33.333MHz	±50ppm
CB3-3C-33M3330	CTS晶振	CB3	33.333MHz	±50ppm
CB3-3C-20M0000	CTS晶振	CB3	20MHz	±50ppm
CB3-3C-20M0000	CTS晶振	CB3	20MHz	±50ppm
CB3-3C-20M0000	CTS晶振	CB3	20MHz	±50ppm
CB3-3C-40M0000	CTS晶振	CB3	40MHz	±50ppm
CB3-3C-40M0000	CTS晶振	CB3	40MHz	±50ppm
CB3-3C-40M0000	CTS晶振	CB3	40MHz	±50ppm
CB3-3C-50M0000	CTS晶振	CB3	50MHz	±50ppm
CB3-3C-50M0000	CTS晶振	CB3	50MHz	±50ppm
CB3-3C-50M0000	CTS晶振	CB3	50MHz	±50ppm
CB3-3I-50M0000	CTS晶振	CB3	50MHz	±50ppm
CB3-3I-50M0000	CTS晶振	CB3	50MHz	±50ppm
CB3-3I-50M0000	CTS晶振	CB3	50MHz	±50ppm
CB3LV-3I-66M0000	CTS晶振	CB3LV	66MHz	±50ppm
CB3LV-3I-66M0000	CTS晶振	CB3LV	66MHz	±50ppm
CB3LV-3I-66M0000	CTS晶振	CB3LV	66MHz	±50ppm
CB3LV-5I-20M0000	CTS晶振	CB3LV	20MHz	±25ppm